Annealing effects in silicon implanted with helium
| First author: |
Li, Bingsheng |
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| Page number: |
5112-5115 |
| Issue: |
24 |
| Subject: |
Instruments & Instrumentation; Nuclear Science & Technology; Physics,; Atomic, Molecular & Chemical; Physics, Nuclear |
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| PubYear: |
2008-12-5 |
| Volume: |
266 |
| Unit code: |
113462 |
| Publication name: |
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS |
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