Annealing effects in silicon implanted with helium
| 第一作者: |
Li, Bingsheng |
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| 页码: |
5112-5115 |
| 期: |
24 |
| 学科: |
Instruments & Instrumentation; Nuclear Science & Technology; Physics,; Atomic, Molecular & Chemical; Physics, Nuclear |
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| 发表年度: |
2008-12-5 |
| 卷: |
266 |
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| 刊物名称: |
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS |
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